# Yanwei Semiconductor (研微半导体)
Wuxi, China, October 2022: a new semiconductor equipment maker opens its doors with one ambition, to build the high-end thin-film deposition machines that Chinese chip fabs have long had to buy from abroad. Yanwei Semiconductor develops atomic layer deposition (depositing ultra-thin films one atomic layer at a time), PECVD, and epitaxy (growing a crystalline layer aligned with the wafer) systems, and within four years it has raised nearly RMB 1.5 billion from more than forty investors, including state-backed industrial giants CETC, CRRC Capital, and BOE. This article covers what the company is: a Chinese semiconductor equipment developer founded in 2022, headquartered in Wuxi, Jiangsu.
| Key fact | Detail |
| --- | --- |
| Founded | October 2022 |
| Headquarters | Wuxi, Jiangsu, China |
| Also known as | PSR |
| Focus | High-end ALD, PEALD, PECVD, and epitaxy equipment |
| Notable products | Spritz, Fluxus, Torridus series |
| Series B round | Nearly RMB 1.5 billion, announced August 27, 2026 |
| Investors | CETC industry fund, CRRC Capital, BOE, CICC Capital, Huatai Zijin, Wuxi government, Qianrong Capital, among 43 listed by PitchBook |
## Spoilers
### Plot
Yanwei Semiconductor (研微半导体), formally Yanwei (Jiangsu) Semiconductor Technology Co., Ltd., was founded in October 2022 with its headquarters in Wuxi, Jiangsu.[1](http://ijiwei.com/n/1094644) The company set out to research, develop, produce, and sell high-end semiconductor thin-film deposition equipment, a segment long dominated by foreign suppliers.[1](http://ijiwei.com/n/1094644)
Its product line centers on thermal ALD (tALD), plasma-enhanced ALD (PEALD), PECVD, and epitaxy systems for silicon, silicon-germanium, and silicon carbide. Tools named "Spritz" and "Fluxus," thermal atomic layer deposition (tALD) systems, target High-k/Metal Gate ([HKMG](https://www.edgepedia.org/hkmg)) stacks, 3D NAND memory, and CMOS image sensors.[2](https://dealroom.co/companies/yanwei-semiconductor-technology/) PitchBook describes the equipment as featuring precise thin-film control and a multi-chamber architecture.[5](https://pitchbook.com/profiles/company/519097-60)
The first deliveries followed: SiC epitaxial equipment to a publicly listed customer and PEALD equipment to leading domestic customers.[2](https://dealroom.co/companies/yanwei-semiconductor-technology/) The Torridus series of SiC EPI tools, compatible with 6-8 inch silicon carbide wafers, is aimed at power semiconductor mass production for electric vehicles, energy storage systems, and industrial applications, and the company has resupplied such equipment to a Chinese stock-market-listed customer.[4](https://stg-www.weex.tech/news/detail/yanwei-semiconductor-resupplies-6-8-inch-silicon-carbide-equipment-jgbyfakft2verreagc69fryl)
**On August 27, 2026, Yanwei announced a Series B round of nearly RMB 1.5 billion, with strategic investment from the CETC industry fund, CRRC Capital, and BOE.**[1](http://ijiwei.com/n/1094644) The deal was structured as convertible preferred stock, with CICC Capital and Huatai Zijin among the participants.[3](https://hk.marketscreener.com/news/yanwei-semiconductor-technology-co-ltd-announced-that-it-has-received-cny-1-5-billion-in-funding-ce7858deda80f72d) Trade press framed the round as backing the company's push toward domestic high-end deposition equipment.[1](http://ijiwei.com/n/1094644)
### Characters
Yanwei Semiconductor is a company rather than a cast of individuals, so this section records its institutional cast. Its strategic backers read like a cross-section of Chinese industry: the CETC industry fund (defense electronics), CRRC Capital (rail rolling stock), and BOE (displays) all took strategic stakes in the 2026 Series B.[1](http://ijiwei.com/n/1094644) Financial investors CICC Capital and Huatai Zijin joined the same round.[3](https://hk.marketscreener.com/news/yanwei-semiconductor-technology-co-ltd-announced-that-it-has-received-cny-1-5-billion-in-funding-ce7858deda80f72d) Earlier support came from the Wuxi government and Qianrong Capital.[2](https://dealroom.co/companies/yanwei-semiconductor-technology/) PitchBook counts 43 investors in total.[5](https://pitchbook.com/profiles/company/519097-60)
## Reception
As a private company, Yanwei has no box office or awards to report. Its reception in the market has been financial: the August 27, 2026 Series B of nearly RMB 1.5 billion, raised roughly four years after founding, was reported by Chinese semiconductor trade press as a major vote of confidence in domestic high-end deposition equipment.[1](http://ijiwei.com/n/1094644) The round's size and the caliber of its strategic investors, including CETC, CRRC Capital, and BOE, drew coverage in financial databases and news services.[3](https://hk.marketscreener.com/news/yanwei-semiconductor-technology-co-ltd-announced-that-it-has-received-cny-1-5-billion-in-funding-ce7858deda80f72d)
## Production
Yanwei was established in October 2022 in Wuxi, a city in Jiangsu province that has become a hub for Chinese semiconductor manufacturing.[1](http://ijiwei.com/n/1094644) The company designs and manufactures ALD, PEALD, PECVD, and epitaxial deposition systems compatible with silicon, silicon carbide, and compound materials.[5](https://pitchbook.com/profiles/company/519097-60) Its named tool families include Spritz and Fluxus for ALD applications such as HKMG, 3D NAND, and CMOS image sensors, and Torridus for silicon carbide epitaxy on 6-8 inch wafers.[2](https://dealroom.co/companies/yanwei-semiconductor-technology/) • [4](https://stg-www.weex.tech/news/detail/yanwei-semiconductor-resupplies-6-8-inch-silicon-carbide-equipment-jgbyfakft2verreagc69fryl) The company is venture-backed and privately held.[5](https://pitchbook.com/profiles/company/519097-60)
## References
1. http://ijiwei.com/n/1094644
2. https://dealroom.co/companies/yanwei-semiconductor-technology/
3. https://hk.marketscreener.com/news/yanwei-semiconductor-technology-co-ltd-announced-that-it-has-received-cny-1-5-billion-in-funding-ce7858deda80f72d
4. https://stg-www.weex.tech/news/detail/yanwei-semiconductor-resupplies-6-8-inch-silicon-carbide-equipment-jgbyfakft2verreagc69fryl
5. https://pitchbook.com/profiles/company/519097-60
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*Topic: Encyclopedia › Society and history › Economics and business › Business and work › Business and work overview › Companies and corporations › Venture-backed startups and growth companies › Deep-tech, hardware, industrial, climate, and mobility startups › Semiconductors and chip equipment › Equipment and design software*
*Initially written Sep 17, 2026 · Reviewed: Sep 19, 2026; Oct 3, 2026 · Edited: Oct 3, 2026 · Last review: Oct 3, 2026*
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License: Edgepedia Community License 1.0, https://www.edgepedia.org/edgepedia/license